Synthesis and Characterization of Filtered-cathodic-vacuum-arc-deposited TiO2Films for Photovoltaic Applications
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چکیده
منابع مشابه
Cyclic Voltammetric Behavior of Nitrogen-Doped Tetrahedral Amorphous Carbon Films Deposited by Filtered Cathodic Vacuum Arc
Nitrogen-doped tetrahedral amorphous carbon (ta-C :N) films were deposited by filtered cathodic vacuum arc (FCVA) technique using nitrogen as a background gas. The structure of the ta-C :N films was studied with X-ray photoelectron spectroscopy (XPS) and Raman spectroscopy in terms of nitrogen flow rate used during the film deposition. Potential windows of the films measured in deaerated and un...
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The filtered cathodic vacuum arc technique was employed to deposit magnetic films such as FeNi on silicon substrate. Using the normal cathode design, tetrahedral amorphous carbon and metals films can be deposited. If a magnetic target is used, the arc spot always preferably moves to the edge of the target and then extinguishes. Therefore, the arc is not stable and no film can be deposited. A ca...
متن کاملThe effect of nitrogen on the mechanical properties of tetrahedral amorphous carbon films deposited with a filtered cathodic vacuum arc
The mechanical properties of both undoped and nitrogen containing tetrahedral amorphous carbon (ta-C and ta-C:N ) films, such as hardness and E-modulus, are investigated. The mechanical properties are related to the film structures. The ta-C and ta-C:N films are prepared in a filtered cathodic vacuum arc process. Nanoindentation testing is used to measure the mechanical properties of these film...
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In this investigation PVD Ti-Cr)N coatings were deposited on hardened and tempered tool steel substrates using reactive arc evaporation. Physical and mechanical properties of coatings such as roughness, thickness, phase composition, hardness and modulus young and coefficient friction were evaluated. Phase compositions were studies by X-ray diffraction method. The surface microstructure and morp...
متن کاملProperties of nitrogen doped tetrahedral amorphous carbon films prepared by filtered cathodic vacuum arc technique
The properties of nitrogen doped tetrahedral amorphous carbon films prepared by the filtered cathodic vacuum arc technique have been studied. The doping species, nitrogen ions, were produced by an ion beam source. The nitrogen flow rate was varied from 0.5 to 10 sccm while keeping other deposition conditions constant. The nitrogen content in deposited films was determined by Rutherford backscat...
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ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2013
ISSN: 1742-6588,1742-6596
DOI: 10.1088/1742-6596/423/1/012005